Substrate size

5-200mm（ Standard）/5-600mm （Optional）

Speed range

10- 12000RPM（ Standard）

11- 10-20000RPM （Optional）

Acceleration range

10-30000RPM/S， Adjustable

Motor speed stability

±1RPM

Spin coating uniformity

±1%

Heating range

Room temperature -200℃

Heating Speed

to 100℃ (1S) to 200℃(2S)

Cooling rate to room temperature

2 second

Human machine interface

8-inch touch screen

Communication interface

USB (standard) / RS485 (standard) /Bluetooth (Optional)

Turn around

Support forward and reverse

Stylus

Stylus BAMBOO resistance pen (standard)

Vacuum Pump

SC-550V

Set data

Unlimited groups data,， 10 speeds per group (standard)

Seconds per period

0- 10000s

Storage data

Unlimited data

Data protection

default with power-down protection

Operating voltage(Spin Coater)

AC100-250V, single phase, 50/60Hz

Operating voltage(Pump)

AC220V(Standard)    AC110V(Optional)

Pumping speed

≥60L/MIN

Max vacuum

-85KPA

Sound Level

≤55db

Spin coater power

650W

Pump power

350W

Dimensions(Spin Coater)

340mm(W)X500mm(D)X250mm(H)

Chamber material

Overall PTFE material

Weight(Spin Coater)

18KG

Weight(Pump)

9KG

Relative humidity

< 85%

Ambient temperature

0-40℃

Warranty

1 year