Substrate size

5mm to 120mm（ 5 inches）

Speed range

50- 10000RPM

Human machine interface

4.3 inch touch screen

Motor speed stability

±1RPM

Spin coating uniformity

±1%

Turn around

Can rotate forward and reverse

Stylus

Stylus BAMBOO resistance pen (standard)

Set data

Unlimited group data, each group of 10 speeds(standard)

Seconds per period

0- 10000s

Storage data

Unlimited data

Operating voltage(Spin Coater)

AC100-250V, single phase, 50/60Hz

Operating voltage(Pump)

AC220V(Standard)    AC110V(Optional)

Pumping speed

≥60L/MIN

Max vacuum

-85KPA

Sound Level

≤55db

Spin coater power

200W

Pump power

350W

Dimensions(Spin Coater)

210mm(W)X220mm(D)X160mm(H)

Weight(Spin Coater)

10KG

Weight(Pump)

9KG

Relative humidity

< 85%

Ambient temperature

0-40℃

Warranty

1 year